Novel semiconductor technologies are creating complex process flows, which are needed to support the manufacturing of advanced 3D semiconductor structures. It can be helpful to model process flows, ...

Driven by the need to objectively measure the progress of their verification efforts and the contributions of different verification techniques, IC designers have adopted coverage as a metric. However ...

Lithography processes were modeled on the basis of coarse-grained polymer simulation techniques using OCTA, which is the simulation software for soft materials, and the simulations of these processes ...